碳纳米管层析成像直接测量电子束强度分布
Direct Measurement of the Electron Beam Intensity Profile via Carbon Nanotube Tomography
摘要：
电子显微镜已经得到改进，以实现更小的束斑，这是决定仪器分辨率的关键参数。然而，测量光束大小的技术还没有发展到同样的程度。有一个持续的需要，以开发检测技术，可以潜在地表征最小的电子束，以进一步提高这些仪器的能力。我们报道了一种基于单壁碳纳米管的新型电子束探测器。纳米管是原子级光滑的，具有良好定义的直径，其尺寸与最细的电子探针相似，并且可以用于直接测量束轮廓。通过以不同角度扫描电子束到纳米管，我们可以通过应用层析重建技术来精确地确定电子束的空间轮廓。
英文摘要：
Electron microscopes have been improved to achieve ever smaller beam spots, a key parameter that determines the instrument's resolution. The techniques to measure the size of the beam, however, have not progressed to the same degree. There is an on-going need to develop detection technologies that can potentially characterize the smallest electron beam to further improve the capabilities of these instruments. We report on a new electron beam detector based on a single-walled carbon nanotube. Nanotubes are atomically smooth, have a well-defined diameter that is similar in size to the finest electron probes and can be used to directly measure the beam profile. By scanning the beam at different angles to the nanotube, we can accurately determine the spatial profile of an electron beam by applying tomographic reconstruction techniques.
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