Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate
Linbo Shao, Smarak Maity, Lu Zheng, Lue Wu, Amirhassan Shams-Ansari, Young-Ik Sohn, Eric Puma, M. N. Gadalla, Mian Zhang, Cheng Wang, Keji Lai, Marko Lončar
Phonons at gigahertz frequencies interact with electrons, photons, and atomic systems in solids, and therefore have extensive applications in signal processing, sensing, and quantum technologies. Surface acoustic wave (SAW) resonators that confine surface phonons can play a crucial role in such integrated phononic systems due to small mode size, low dissipation, and efficient electrical transduction. To date, it has been challenging to achieve high quality (Q) factor and small phonon mode size for SAW resonators at gigahertz frequencies. Here, we present a methodology to design compact high-Q SAW resonators on lithium niobate operating at gigahertz frequencies. We experimentally verify out designs and demonstrate Q factors in excess of $2\times10^4$ at room temperature ($6\times10^4$ at 4 Kelvin) and mode area as low as $1.87 λ^2$. This is achieved by phononic band structure engineering, which provides high confinement with low mechanical loss. The frequency-Q products (fQ) of our SAW resonators are greater than $10^{13}$. These high-fQ and small mode size SAW resonators could enable applications in quantum phononics and integrated hybrid systems with phonons, photons, and solid-state qubits.
We report direct visualization of gigahertz-frequency Lamb waves propagation in aluminum nitride phononic circuits by transmission-mode microwave impedance microscopy (TMIM). Consistent with the finite-element modeling, the acoustic eigenmodes in both a horn-shaped coupler and a sub-wavelength waveguide are revealed in the TMIM images. Using fast Fourier transform filtering, we quantitatively analyze the acoustic loss of individual Lamb modes along the waveguide and the power coupling coefficient between the waveguide and the parabolic couplers. Our work provides insightful information on the …
We report direct visualization of gigahertz-frequency acoustic waves in lithium niobate phononic circuits. Primary propagation parameters, such as the power flow angle (PFA) and propagation loss (PL), are measured by transmission-mode microwave impedance microscopy (TMIM). Using fast Fourier transform, we can separately analyze forward and backward propagating waves and quantitatively evaluate the propagation loss. Our work provides insightful information on the propagation, diffraction, and attenuation in piezoelectric thin films, which is highly desirable for designing and optimizing phononi…
Topological phononics offers numerous opportunities in manipulating elastic waves that can propagate in solids without being backscattered. Due to the lack of nanoscale imaging tools that aid the system design, however, acoustic topological metamaterials have been mostly demonstrated in macroscale systems operating at low (kilohertz to megahertz) frequencies. Here, we report the realization of gigahertz topological valley Hall effect in nanoelectromechanical AlN membranes. Propagation of elastic wave through phononic crystals is directly visualized by microwave microscopy with unprecedented se…
We investigate the performance of microwave-frequency phononic crystal resonators fabricated on thin-film lithium niobate for integration with superconducting quantum circuits. For different design geometries at millikelvin temperatures, we achieve mechanical internal quality factors $Q_i$ above $10^5 - 10^6$ at high microwave drive power, corresponding to $5\times10^6$ phonons inside the resonator. By sweeping the defect size of resonators with identical mirror cell designs, we are able to indirectly observe signatures of the complete phononic bandgap via the resonators' internal quality fact…
We report the design of GaAs-based monolithic valley phononic crystals (VPnCs) with multiple complete phononic bandgaps, which support simultaneous valley-protected edge states with different symmetries in the gigahertz (GHz) range. Rotation of triangular holes in the unit cells breaks the mirror symmetry, and this orientation degree of freedom enables the structures to exhibit different valley vortex chiralities. We numerically demonstrate the transport of multi-band valley-protected edge states with suppressed backscattering at the sharp corners of the interfaces between different VPnCs. Suc…
Connecting nanoscale mechanical resonators to microwave quantum circuits opens new avenues for storing, processing, and transmitting quantum information. In this work, we couple a phononic crystal cavity to a tunable superconducting quantum circuit. By fabricating a one-dimensional periodic pattern in a thin film of lithium niobate and introducing a defect in this artificial lattice, we localize a 6 gigahertz acoustic resonance to a wavelength-scale volume of less than one cubic micron. The strong piezoelectricity of lithium niobate efficiently couples the localized vibrations to the electric …
Acoustically driven spin-wave resonance in a phononic crystal cavity is numerically investigated. The designed cavity enables confinement of gigahertz vibrations in a wavelength-scale point-defect structure and sustains a variety of resonance modes. Inhomogeneous strain distributions in the modes modify the magnetostrictive coupling and the spin-wave excitation susceptible to an external field orientation. In particular, a monopole-like mode in the cavity having a near-symmetrical pattern shows a subwavelength-scale mode volume and can provide a versatile acoustic excitation scheme independent…
The design and fabrication of phononic crystals (PnCs) hold the key to control the propagation of heat and sound at the nanoscale. However, there is a lack of experimental studies addressing the impact of order/disorder on the phononic properties of PnCs. Here, we present a comparative investigation of the influence of disorder on the hypersonic and thermal properties of two-dimensional PnCs. PnCs of ordered and disordered lattices are fabricated of circular holes with equal filling fractions in free-standing Si membranes. Ultrafast pump and probe spectroscopy (asynchronous optical sampling) a…
Photonic crystal membranes (PCM) provide a versatile planar platform for on-chip implementations of photonic quantum circuits. One prominent quantum element is a coupled system consisting of a nanocavity and a single quantum dot (QD) which forms a fundamental building block for elaborate quantum information networks and a cavity quantum electrodynamic (cQED) system controlled by single photons. So far no fast tuning mechanism is available to achieve control within the system coherence time. Here we demonstrate dynamic tuning by monochromatic coherent acoustic phonons formed by a surface acoust…
We have studied acoustic topological edge modes in a honeycomb phononic crystal composed of metallic nano-pillars on a LiNbO$_3$ substrate. Acoustic band calculations show that the topological surface acoustic wave (SAW) mode inhabits the edge of the honeycomb phononic crystal in spite of the hybridization with the internal acoustic modes of the substrate. Pulse-type microwave impedance microscopy realized clear visualization of the gigahertz topological edge mode between two mutually inverted topological phononic crystals. A frequency-dependent image showed that the edge mode evolves as the b…
In ballistic transport, heat carriers such as phonons travel through the solid without any scattering or interaction. Therefore, there is no temperature gradient in the solid, which seems to transport the heat without getting heated itself. Ballistic transport is typically seen in high purity crystals at either temperatures below ~10 K, or physical size below ~100 nm, where the mean free path of the carrier is larger than the solid itself. In this letter, we show evidence of ballistic transport at room temperature in lithium niobate wafers in the in-plane and cross-plane directions under both …
We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by material loss. The design method we employ is widely applicable to the transduction of wavelength-scale structures used in emerging phononic circuits like those at the heart of many optomechanical microwave-to-optical quantum converters.
We propose sub-harmonic resonant optical excitation with femtosecond lasers as a new method for the characterization of phononic and nanomechanical systems in the gigahertz to terahertz frequency range. This method is applied for the investigation of confined acoustic modes in a free-standing semiconductor membrane. By tuning the repetition rate of a femtosecond laser through a sub-harmonic of a mechanical resonance we amplify the mechanical amplitude, directly measure the linewidth with megahertz resolution, infer the lifetime of the coherently excited vibrational states, accurately determine…
The century-old study of photon-phonon coupling has seen a remarkable revival in the past decade. Driven by early observations of dynamical back-action, the field progressed to ground-state cooling and the counting of individual phonons. A recent branch investigates the potential of traveling-wave, optically broadband photon-phonon interaction in silicon circuits. Here, we report continuous-wave Brillouin gain exceeding the optical losses in a series of suspended silicon beams, a step towards selective on-chip amplifiers. We obtain efficiencies up to $10^{4} \, \text{W}^{-1}\text{m}^{-1}$, the…
We propose a universal, on-chip quantum transducer based on surface acoustic waves in piezo-active materials. Because of the intrinsic piezoelectric (and/or magnetostrictive) properties of the material, our approach provides a universal platform capable of coherently linking a broad array of qubits, including quantum dots, trapped ions, nitrogen-vacancy centers or superconducting qubits. The quantized modes of surface acoustic waves lie in the gigahertz range, can be strongly confined close to the surface in phononic cavities and guided in acoustic waveguides. We show that this type of surface…
Surface acoustic waves (SAWs) are a versatile tool for coherently interfacing with a variety of solid-state quantum systems spanning microwave to optical frequencies, including superconducting qubits, spins, and quantum emitters. Here, we demonstrate SAW cavity optomechanics with quantum emitters in 2D materials, specifically monolayer WSe$_2$, on a planar lithium niobate SAW resonator driven by superconducting electronics. Using steady-state photoluminescence spectroscopy and time-resolved single-photon counting, we map the temporal dynamics of modulated 2D emitters under coupling to differen…
The electrical generation and detection of elastic waves are the foundation for acousto-electronic and acousto-optic systems. For surface-acoustic-wave devices, micro-/nano-electromechanical systems, and phononic crystals, tailoring the spatial variation of material properties such as piezoelectric and elastic tensors may bring significant improvements to the system performance. Due to the much smaller speed of sound than speed of light in solids, it is desirable to study various electroacoustic behaviors at the mesoscopic length scale. In this work, we demonstrate the interferometric imaging …
