金与AIII-BV半导体相互作用的原子水平研究
Towards Understanding of Gold Interaction with AIII-BV Semiconductors at Atomic Level
摘要：
几十年来，AIII-BV半导体一直被认为是克服硅半导体器件局限性的有前途的材料。AIII-BV半导体技术的一个重要方面是纳米尺度上的金-半导体相互作用。我们报告的调查与AIII-BV半导体晶体的Au原子的基本化学相互作用的调查的纳米结构的形成过程中的热诱导Au自组装在各种AIII-BV表面，这是通过原子分辨的高角度环形暗场（HAADF）扫描透射电子显微镜（STEM）测量。我们已经发现，纳米结构的形成是由Au诱导的化学反应在AIII-BV半导体表面上产生的吸附原子的表面扩散和成核的结果。仅对于InSb晶体，我们发现Au原子有效地扩散到体中，我们通过机器学习HAADF STEM图像量化和理论上通过包含有限温度效应的密度泛函理论（DFT）计算进行了实验研究。此外，已估计释放一个AIII金属原子所需的Au原子的有效数目。实验结果揭示了Au与AIII-BV半导体的In基和Ga基基团的相互作用的差异。我们的全面和系统的研究揭示了Au与AIII-BV表面在原子水平上的相互作用的细节，具有化学灵敏度，并在原子尺度上揭示了Au/AIII-BV相互作用的基本原理。
英文摘要：
AIII-BV semiconductors have been considered for decades to be a promising material in overcoming the limitations of silicon semiconductor devices. One of the important aspects within AIII-BV semiconductor technology are gold-semiconductor interactions on the nanoscale. We report on investigations into the basic chemical interactions of Au atoms with AIII-BV semiconductor crystals by an investigation of nanostructures formation in the process of thermally-induced Au self-assembly on various AIII-BV surfaces, and this by means of atomically resolved High Angle Annular Dark Field (HAADF) Scanning Transmission Electron Microscopy (STEM) measurements. We have found that the formation of nanostructures is a consequence of the surface diffusion and nucleation of adatoms produced by Au induced chemical reactions on AIII-BV semiconductor surfaces. Only for InSb crystal we have found that there is efficient diffusion of Au atoms into the bulk, which we experimentally studied by Machine Learning HAADF STEM image quantification and theoretically by Density Functional Theory (DFT) calculations with the inclusion of finite temperature effects. Furthermore, the effective number of Au atoms needed to release one AIII metal atom has been estimated. The experimental finding reveals a difference in the Au interactions with In- and Ga-based groups of AIII-BV semiconductors. Our comprehensive and systematic studies uncover details of the Au interactions with the AIII-BV surface at the atomic level with chemical sensitivity and shed new light on the fundamental Au/AIII-BV interactions at the atomic scale.
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