六自由度粘滞阻尼与钢弹簧组合的光学工作台高性能被动隔振系统
High performance passive vibration isolation system for optical tables using six-degree-of-freedom viscous damping combined with steel springs
摘要：
建筑物中的机械振动无处不在。这种振动限制了用于例如高精度制造、纳米制造、计量、医疗系统或显微镜的敏感仪器的性能。为了提高精度，仪器和光学工作台需要与机械振动隔离。然而，当需要低频振动隔离或低频振动隔离是昂贵的时，常见的主动或被动振动隔离系统通常表现不佳。此外，简单的解决方案，例如从普通弹力绳悬挂，可能需要高天花板。在这里，我们开发了一个振动隔离系统，使用钢弹簧悬挂在一个共同的高度天花板的光学工作台。该系统被设计用于0.5 Hz的基本谐振频率。谐振和振动被有效地阻尼在所有的平移和旋转自由度的光学工作台的球体，安装在桌子下面，并沉浸在一个高粘度的硅油。我们的低成本无源系统优于几种最先进的无源和有源系统，特别是在1-10 Hz的频率范围内。我们将这种性能归因于自由度和真正三维粘性阻尼之间的最小耦合以及非线性流体动力学有限尺寸效应。此外，该系统可以适应不同的负载、谐振频率和尺寸。从长远来看，该系统的卓越性能将允许对许多不同的仪器进行高精度测量。
英文摘要：
Mechanical vibrations in buildings are ubiquitous. Such vibrations limit the performance of sensitive instruments used, for example, for high-precision manufacturing, nanofabrication, metrology, medical systems, or microscopy. For improved precision, instruments and optical tables need to be isolated from mechanical vibrations. However, common active or passive vibration isolation systems often perform poorly when low-frequency vibration isolation is required or are expensive. Furthermore, a simple solution such as suspension from common bungee cords may require high ceilings. Here we developed a vibration isolation system that uses steel springs to suspend an optical table from a common-height ceiling. The system was designed for a fundamental resonance frequency of 0.5 Hz. Resonances and vibrations were efficiently damped in all translational and rotational degrees of freedom of the optical table by spheres, which were mounted underneath the table and immersed in a highly viscous silicone oil. Our low-cost, passive system outperformed several state-of-the-art passive and active systems in particular in the frequency range between 1-10 Hz. We attribute this performance to a minimal coupling between the degrees of freedom and the truly three dimensional viscous damping combined with a nonlinear hydrodynamic finite-size effect. Furthermore, the system can be adapted to different loads, resonance frequencies, and dimensions. In the long term, the excellent performance of the system will allow high-precision measurements for many different instruments.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
