牺牲模板复制：在透明熔融石英玻璃中制备任意三维悬浮中空微结构
Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
摘要：
熔融石英玻璃是所有需要长期化学和机械稳定性以及优异光学性能的应用中的首选材料。在透明熔融石英玻璃内制造复杂的中空微结构尤其对于化学合成的小型化具有高度兴趣，以实现更通用、可配置和环境友好的流通化学以及高质量的光波导或毛细管。然而，由于玻璃的高热稳定性和化学稳定性以及机械硬度，这种复杂三维结构的微结构化已被证明是难以实现的。在这里，我们提出了一种在熔融石英玻璃中生成中空微结构的方法，该方法具有不可见的精度和三维设计的自由度。该工艺将牺牲模板复制的概念与熔融石英玻璃的室温成型工艺相结合。所制造的玻璃芯片是多功能的工具，其中，在芯片上化学合成的微型化的进步。
英文摘要：
Fused silica glass is the preferred material in all applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of high interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures has proven evasive due to the high thermal and chemical stability as well as mechanical hardness of glass. Here we present an approach for the generation of hollow microstructures in fused silica glass with unseen precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
