优化硅基反射镜法布里-珀罗干涉仪的效率
Optimizing the Efficiency of Fabry-Perot Interferometers with Silicon-Substrate Mirrors
摘要：
我们提出了一种新颖的设计，微加工，硅衬底为基础的反射镜用于低温法布里-珀罗干涉仪（FPI）的中红外线亚毫米/毫米波长制度。硅衬底的一侧将具有各向异性蚀刻到其中的双层超材料抗反射涂层（ARC），另一侧将用反射网格图案金属化。双层ARC确保在FPI带宽上表面基板处的反射率小于1%。需要这种低反射率来实现宽带能力并减轻来自硅表面的污染谐振。两个硅衬底的金属化表面相互面对，并保持平行，可调间距将构成FPI。为了在整个FPI带宽上创建具有几乎均匀精细度的FPI，我们使用蒸发到硅衬底上的电感和电容金网的组合。我们还考虑使用铌作为长波长的超导反射网，以消除FPI谐振腔中每次反射时的欧姆损耗，从而增加整体传输。我们开发这些基于硅衬底的FPI用于地面（例如CCAT-prime），空中（例如HIRMES）和未来的太空望远镜（例如起源太空望远镜概念）。这种FPI非常适合于即将到来的大型IR/亚毫米/毫米TES测辐射热计探测器阵列的光谱成像。在这里，我们提出的制造和性能的多层，等离子体蚀刻，硅超材料ARC，以及模型的镜子和FPI。
英文摘要：
We present the novel design of microfabricated, silicon-substrate based mirrors for use in cryogenic Fabry-Perot Interferometers (FPIs) for the mid-IR to sub-mm/mm wavelength regime. One side of the silicon substrate will have a double-layer metamaterial anti-reflection coating (ARC) anisotropically etched into it and the other side will be metalized with a reflective mesh pattern. The double-layer ARC ensures a reflectance of less than 1% at the surface substrate over the FPI bandwidth. This low reflectance is required to achieve broadband capability and to mitigate contaminating resonances from the silicon surface. Two silicon substrates with their metalized surfaces facing each other and held parallel with an adjustable separation will compose the FPI. To create an FPI with nearly uniform finesse over the FPI bandwidth, we use a combination of inductive and capacitive gold meshes evaporated onto the silicon substrate. We also consider the use of niobium as a superconducting reflective mesh for long wavelengths to eliminate ohmic losses at each reflection in the resonating cavity of the FPI and thereby increase overall transmission. We develop these silicon-substrate based FPIs for use in ground (e.g. CCAT-prime), air (e.g. HIRMES), and future space-based telescopes (e.g. the Origins Space Telescope concept). Such FPIs are well suited for spectroscopic imaging with the upcoming large IR/sub-mm/mm TES bolometer detector arrays. Here we present the fabrication and performance of multi-layer, plasma-etched, silicon metamaterial ARC, as well as models of the mirrors and FPIs.
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