具有空间可视化多模运动的超宽带隙β- Ga2O3纳米机械谐振器
Ultrawide Band Gap β-Ga2O3 Nanomechanical Resonators with Spatially Visualized Multimode Motion
摘要：
β-氧化镓（β-Ga 2 O3）是一种新兴的超宽带隙（4.5 - 4.9 eV）半导体材料，在未来的电力电子、光电子以及气体和紫外线检测传感器中具有诱人的性能。通过各种方法制备的β-Ga 2 O 3薄膜正被积极地研究以用于这样的器件。在这里，我们报告的实验演示单晶β-Ga 2 O 3纳米机械谐振器使用β-Ga 2 O 3纳米片生长通过低压化学气相沉积（LPCVD）。通过研究β-Ga 2 O3圆形鼓面结构，我们在高频和甚高频（HF / VHF）波段实现了6阶模式的多模纳米谐振器，并实现了多模运动的空间映射和可视化。测量结果表明，弹性模量E_Y = 261 GPa，双轴各向异性内建张力分别为37.5MPa和107.5MPa。我们发现，热退火可以显着改善谐振特性，包括约40%的频率上移和约90%的质量（Q）因子的增强。该研究为今后探索和开发机械耦合和可调谐β-Ga 2 O3电子、光电和物理传感器件奠定了基础。
英文摘要：
Beta gallium oxide (β-Ga2O3) is an emerging ultrawide band gap (4.5 - 4.9 eV) semiconductor with attractive properties for future power electronics, optoelectronics, and sensors for detecting gases and ultraviolet radiation. β-Ga2O3 thin films made by various methods are being actively studied toward such devices. Here, we report on the experimental demonstration of single-crystal β-Ga2O3 nanomechanical resonators using β-Ga2O3 nanoflakes grown via low-pressure chemical vapor deposition (LPCVD). By investigating β-Ga2O3 circular drumhead structures, we demonstrate multimode nanoresonators up to the 6th mode in high and very high frequency (HF / VHF) bands, and also realize spatial mapping and visualization of the multimode motion. These measurements reveal a Young's modulus of E_Y = 261 GPa and anisotropic biaxial built-in tension of 37.5 MPa and 107.5 MPa. We find that thermal annealing can considerably improve the resonance characteristics, including ~40% upshift in frequency and ~90% enhancement in quality (Q) factor. This study lays a foundation for future exploration and development of mechanically coupled and tunable β-Ga2O3 electronic, optoelectronic, and physical sensing devices.
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