片上可扩展光机械磁力计
On-chip scalable optomechanical magnetometers
摘要：
腔式光机械磁力计中机械和光学响应的双共振增强使得能够精确地感测磁场。在这种磁力计的先前工作原型中，腔光学机械系统通过手动环氧树脂结合磁致伸缩材料的颗粒来功能化。虽然这种方法允许原理验证演示，但实际应用需要更可扩展和可再现的制造途径。在这项工作中，我们可扩展地制造光机械磁力计的硅芯片上，在不同的设备具有可重复的性能，通过溅射涂层的磁致伸缩膜到高品质的环形微谐振器。此外，我们表明，热退火的溅射膜可以提高磁力计的灵敏度的6.3倍。获得了585 pT/Hz ^[1/2]的峰值灵敏度，这与以前报道的使用环氧键合的结果相当。
英文摘要：
The dual-resonant enhancement of mechanical and optical response in cavity optomechanical magnetometers enables precision sensing of magnetic fields. In previous working prototypes of such magnetometers, a cavity optomechanical system is functionalized by manually epoxy-bonding a grain of magnetostrictive material. While this approach allows proof-of-principle demonstrations, practical applications require more scalable and reproducible fabrication pathways. In this work, we scalably fabricate optomechanical magnetometers on a silicon chip, with reproducible performance across different devices, by sputter coating a magnetostrictive film onto high quality toroidal microresonators. Furthermore, we demonstrate that thermally annealing the sputtered film can improve the magnetometer sensitivity by a factor of 6.3. A peak sensitivity of 585 pT/Hz^1/2 is achieved, which is comparable with previously reported results using epoxy-bonding.
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