Deuterated silicon nitride photonic devices for broadband optical frequency comb generation
Jeff Chiles, Nima Nader, Daniel D. Hickstein, Su Peng Yu, Travis Crain Briles, David Carlson, Hojoong Jung, Jeffrey M. Shainline, Scott Diddams, Scott B. Papp, … 展开作者
Jeff Chiles, Nima Nader, Daniel D. Hickstein, Su Peng Yu, Travis Crain Briles, David Carlson, Hojoong Jung, Jeffrey M. Shainline, Scott Diddams, Scott B. Papp, Sae Woo Nam, Richard P. Mirin
We report and characterize low-temperature, plasma-deposited deuterated silicon nitride thin films for nonlinear integrated photonics. With a peak processing temperature less than 300$^\circ$C, it is back-end compatible with pre-processed CMOS substrates. We achieve microresonators with a quality factor of up to $1.6\times 10^6 $ at 1552 nm, and $>1.2\times 10^6$ throughout $λ$ = 1510 -- 1600 nm, without annealing or stress management. We then demonstrate the immediate utility of this platform in nonlinear photonics by generating a 1 THz free spectral range, 900-nm-bandwidth modulation-instability microresonator Kerr comb and octave-spanning, supercontinuum-broadened spectra.
Chemical vapor deposition-based growth techniques allow flexible design of CMOS-compatible materials. Here, we report the deuterated silicon-rich nitride films grown using plasma-enhanced chemical vapor deposition. The linear and nonlinear properties of the films are characterized. We compare the absorption at 1550nm wavelength region for films grown with $SiH_4$ and $SiD_4$, and experimentally confirm that the silicon-rich nitride films grown with $SiD_4$ eliminates Si-H related absorption. Waveguides fabricated on the films are further shown to possess a linear and nonlinear refractive index…
Aluminum nitride is an appealing nonlinear optical material for on-chip wavelength conversion. Here we report optical frequency comb generation from high quality factor aluminum nitride micro-ring resonators integrated on silicon substrates. By engineering the waveguide structure to achieve near-zero dispersion at telecommunication wavelengths and optimizing the phase matching for four-wave mixing, frequency combs are generated with a single wavelength continuous-wave pump laser. The Kerr coefficient (n2) of aluminum nitride is further extracted from our experimental results.
Aluminum nitride has been shown to possess both strong Kerr nonlinearity and electro-optic Pockels effect. By combining these two effects, here we demonstrate on-chip reversible on/off switching of the optical frequency comb generated by an aluminum nitride microring resonator. We optimize the design of gating electrodes and the underneath resonator structure to effectively apply electric field without increasing the optical loss. The switching of the comb is monitored by measuring one of the frequency comb peaks while varying the electric field. The controlled comb electro-optic response is i…
We observe a transition to a coherent-comb state in a SiN-microresonator with anomalous dispersion. Although ~300 fs pulse trains are generated after line-by-line shaping, the intensity within the microring does not appear to be pulse-like.
We demonstrate a frequency comb spanning an octave via the parametric process of cascaded four-wave mixing in a monolithic, high-Q silicon nitride microring resonator. The comb is generated from a single-frequency pump laser at 1562 nm and spans 128 THz with a spacing of 226 GHz, which can be tuned slightly with the pump power. In addition, we investigate the RF-noise characteristics of the parametric comb and find that the comb can operate in a low-noise state with a 30-dB reduction in noise as the pump frequency is tuned into the cavity resonance.
Aluminum nitride and silicon nitride have recently emerged as important nonlinear optical materials in integrated photonics respectively for their quadratic and cubic optical nonlinearity. A composite aluminum nitride and silicon nitride waveguide structure, if realized, will simultaneously allow highly efficient second and third harmonic generation on the same chip platform and therefore assists 2f-3f self-referenced frequency combs. On-chip third harmonic generation, being a higher order nonlinear optics effect, is more demanding than second harmonic generation due to the large frequency dif…
We utilize silicon-nitride waveguides to self-reference a telecom-wavelength fiber frequency comb through supercontinuum generation, using 11.3 mW of optical power incident on the chip. This is approximately ten times lower than conventional approaches using nonlinear fibers and is enabled by low-loss (<2 dB) input coupling and the high nonlinearity of silicon nitride, which can provide two octaves of spectral broadening with incident energies of only 110 pJ. Following supercontinuum generation, self-referencing is accomplished by mixing 780-nm dispersive-wave light with the frequency-doubled …
Kerr frequency combs generated from microresonators are the subject of intense study. Most research employs microresonators with anomalous dispersion, for which modulation instability is believed to play a key role in initiation of the comb. Comb generation in normal dispersion microresonators has also been reported but is less well understood. Here we report a detailed investigation of few-moded, normal dispersion silicon nitride microresonators, showing that mode coupling can strongly modify the local dispersion, even changing its sign. We demonstrate a link between mode coupling and initiat…
Development of chip-scale optical frequency comb with the coverage from ultra-violet (UV) to mid-infrared (MIR) wavelength is of great significance. To expand the comb spectrum into the challenging UV region, a material platform with high UV transparency is crucial. In this paper, crystalline aluminum nitride (AlN)-onsapphire film is demonstrated for efficient Kerr frequency comb generation. Near-infrared (NIR) comb with nearly octave-spanning coverage and low parametric threshold is achieved in continuous-wave pumped high-quality-factor AlN microring resonators. The competition between stimul…
Silicon nitride (Si$_3$N$_4$) is an ever-maturing integrated platform for nonlinear optics. Yet, due to the absence of second-order ($χ^{(2)}$) nonlinearity, Si$_3$N$_4$ is mostly considered for third-order ($χ^{(3)}$) nonlinear interactions. Recently, this limitation was overcome by optical poling in both Si$_3$N$_4$ waveguides and microresonators via the photogalvanic effect, resulting in the inscription of quasi-phase-matched $χ^{(2)}$ gratings. Here, we report cascaded nonlinear effects in a normal dispersion Si$_3$N$_4$ microresonator with combined $χ^{(2)}$ and $χ^{(3)}$ nonlinearities. …
A systematic dispersion engineering approach is presented toward designing a III-Nitride micro-resonator for a blue/UV frequency comb. The motivation for this endeavor is to fill the need for compact, coherent, multi-wavelength photon sources that can be paired with, e.g., the $^{171}{\textrm{Yb}}^{+}$ ion in a photonic integrated chip for optical sensing, time-keeping, and quantum computing applications. The challenge is to overcome the normal material dispersion exhibited by the otherwise ideal i.e., low-loss and large-Kerr-coefficient) AlGaN family of materials, as this is a prerequisite fo…
Mid-infrared optical frequency combs are of significant interest for molecular spectroscopy due to the large absorption of molecular vibrational modes on one hand, and the ability to implement superior comb-based spectroscopic modalities with increased speed, sensitivity and precision on the other hand. Substantial advances in mid-infrared frequency comb generation have been made in recent years based on nonlinear frequency conversion, microresonator Kerr frequency combs, quantum cascade lasers and mode locking regimes. Here we demonstrate a simple, yet effective method for the direct generati…
Schemes to achieve strong coupling between mechanical modes of aluminum nitride microstructures and microwave cavity modes due to the piezoelectric effect are proposed. We show that the strong coupling regime is feasible for an on-chip aluminum nitride device that is either enclosed by a three-dimensional microwave cavity or integrated with a superconducting coplanar resonator. Combining with optomechanics, the piezomechanical strong coupling permits coherent conversion between microwave and optical modes with high efficiency. Hence, the piezomechanical system will be an efficient transducer f…
We demonstrate the generation of counter-rotating cavity solitons in a silicon nitride microresonator using a fixed, single-frequency laser. We demonstrate a dual 3-soliton state with a difference in the repetition rates of the soliton trains that can be tuned by varying the ratio of pump powers in the two directions. Such a system enables a highly compact, tunable dual comb source that can be used for applications such as spectroscopy and distance ranging.
We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition (ALD). Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. All results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum.
Optical fiber tapers are used to collect photoluminescence emission at ~1.5 um from photonic crystal cavities fabricated in erbium doped silicon nitride on silicon. Photoluminescence collection via fiber taper is enhanced 2.5 times relative to free space, with a total taper collection efficiency of 53%. By varying the fiber taper offset from the cavity, a broad tuning range of coupling strength is obtained. This material system combined with fiber taper collection is promising for building on-chip optical amplifiers.
We present a scheme of XOR/XNOR logic gate, based on non phase-matched noncollinear second harmonic generation from a medium of suitable crystalline symmetry, Gallium nitride. The polarization of the noncollinear generated beam is a function of the polarization of both pump beams, thus we experimentally investigated all possible polarization combinations, evidencing that only some of them are allowed and that the nonlinear interaction of optical signals behaves as a polarization based XOR. The experimental results show the peculiarity of the nonlinear optical response associated with noncollin…
The repetition rate of a Kerr comb comprising a single soliton in an anomalous dispersion silicon nitride microcavity is measured as a function of pump frequency tuning. The contributions from the Raman soliton self-frequency shift (SSFS) and from thermal effects are evaluated both experimentally and theoretically; the SSFS is found to dominate the changes in repetition rate. The relationship between the changes in repetition rate and pump frequency detuning is found to be independent of the nonlinearity coefficient and dispersion of the cavity. Modeling of the repetition rate change by using …
We demonstrate a silicon nitride trench waveguide deposited with bowtie antennas for plasmonic enhanced optical trapping. The sub-micron silicon nitride trench waveguides were fabricated with conventional optical lithography in a low cost manner. The waveguides embrace not only low propagation loss and high nonlinearity, but also the inborn merits of combining micro-fluidic channel and waveguide together. Analyte contained in the trapezoidal trench channel can interact with the evanescent field from the waveguide beneath. The evanescent field can be further enhanced by plasmonic nanostructures…
Ultra-compact topological ring-resonators with chirality are important devices for quantum optics. However, there are limited demonstrations of chiral resonators, especially in the visible region. We proposed a topological photonic ring-resonator based on hexagonal boron nitride (hBN) valley photonic crystal (VPC). The spin-valley locking effect in VPC allows achieving robust unidirectional transmission of edge states in the visible region (600 nm-650 nm). As a result, a high quality factor (679.3) with a free spectral range of 15.2 nm in the visible region can be achieved in a hBN all-pass fi…
On-chip frequency comb generations enable compact broadband sources for spectroscopic sensing and precision spectroscopy. Recent microcomb studies focus on infrared spectral regime and have difficulty in accessing visible regime. Here, we demonstrate comb-like visible frequency line generation through second, third harmonic, and sum frequency conversion of a Kerr comb within a high Q aluminum nitride microring resonator pumped by a single telecom laser. The strong power enhancement, in conjunction with the unique combination of Pockels and Kerr optical nonlinearity of aluminum nitride, leads t…
Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a s…
Silicon nitride (SiN) photonics platform has attributes of ultra-low linear and nonlinear propagation losses and CMOS-compatible fabrication process, promising large-scale multifunctional photonic circuits. However, the centrosymmetric nature of SiN inhibits second-order nonlinear optical responses in its photonics platform, which is desirable for developing efficient nonlinear active devices. Here, we demonstrate high-efficiency second-order nonlinear processes in SiN photonics platform by integrating a few-layer GaSe flake on a SiN microring resonator. With the pump of microwatts continuous-…
High-harmonic generation is the cornerstone of nonlinear optics. It has been demonstrated in a wide range of crystalline systems including dielectrics, semiconductors, and semi-metals, as well as in gases, leaving metals out due to their low damage threshold. Here, we report on the high-harmonic generation in metallic titanium nitride (TiN) films. TiN is a refractory plasmonic metal, known for its high melting temperature and laser damage threshold, with optical properties similar to those of gold. We show that TiN can withstand laser pulses with peak intensities as high as 13 TW/cm$^2$, one o…
Frequency microcombs, successors to mode-locked laser and fiber combs, enable miniature rulers of light for applications including precision metrology, molecular fingerprinting, and exoplanet discoveries. To enable the frequency ruling function, microcombs must be stabilized by locking their carrier-envelop offset frequency. So far, the microcomb stabilization remains compounded by the elaborate optics external to the chip, thus evading its scaling benefit. To address this challenge, here we demonstrate a nanophotonic chip solution based on aluminum nitride thin films, which simultaneously off…
We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging from 8.5 to 200 $μ$m. Their optical properties are accurately determined using a combination of broadband and monochromatic illuminations and the lowest vibrational mode frequencies and mechanical quality factors are determined interferometrically. The results and techniques demonstrated are promising for investigations of collective phenomena in optomechanic…
The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at λ = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends are structured into a folded waveguide geometry to form a rectangular spiral within an area of 65 x 65 \mum2 possessing a total active waveguide length of 1.2 mm. The device features a phase shifting efficiency of 8 mW/π and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform combining the prop…
Low phase noise lasers based on the combination of III-V semiconductors and silicon photonics are well established in the near-infrared spectral regime. Recent advances in the development of low-loss silicon nitride-based photonic integrated resonators have allowed to outperform bulk external diode and fiber lasers in both phase noise and frequency agility in the 1550 nm-telecommunication window. Here, we demonstrate for the first time a hybrid integrated laser composed of a gallium nitride (GaN) based laser diode and a silicon nitride photonic chip-based microresonator operating at record low…
The fabrication processes of silicon nitride photonic devices used in foundries require low temperature deposition, which typically leads to high propagation losses. Here, we show that propagation loss as low as 0.42 dB/cm can be achieved using foundry compatible processes by solely reducing waveguide surface roughness. By post-processing the fabricated devices using rapid thermal anneal (RTA) and furnace anneal, we achieve propagation losses down to 0.28 dB/cm and 0.06 dB/cm, respectively. These low losses are comparable to the conventional devices using high temperature, high-stress low-pres…
Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth as well as compatibility for embedding into integrated photonic circuits are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around 1.55 um wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation…
The silicon nitride integration platform has been successful at realizing extremely low waveguide losses across the visible to infrared and components including high performance lasers, filters, resonators, stabilization cavities, and optical frequency combs. Yet, progress towards implementing low loss, low power modulators in the silicon nitride platform, while maintaining the planar, wafer-scale process compatibility has been limited. Here we report a significant advance in integration of a piezo-electric (PZT) actuated micro-ring modulation in a fully-planar, wafer-scale silicon nitride pla…
We demonstrate an external cavity laser formed by combining a silicon nitride photonic integrated circuit with a reflective semiconductor optical amplifier. The laser uses an alignment tolerant edge coupler formed by a multi-mode waveguide splitter right at the edge of the silicon nitride chip that relaxes the required alignment to the III-V gain chip and equally splits the power among its two output waveguides. Both the ground and first order mode are excited in the coupler and reach the quadrature condition at the waveguide junction, ensuring equal power to be coupled to both. Two high-quali…
Applications of quantum science to computing, cryptography and imaging are on their way to becoming key next generation technologies. Owing to the high-speed transmission and exceptional noise properties of photons, quantum photonic architectures are likely to play a central role. A long-standing hurdle, however, has been the realization of robust, device-compatible single photon sources that can be activated and controlled on demand. Here we use strain engineering to create large arrays of quantum emitters in two-dimensional hexagonal boron nitride (hBN). The large energy gap inherent to this…
Time-resolved direct frequency comb spectroscopy (TRFCS) was used to study the kinetics of the deuterated analogue of the OH+CO->H+CO2 reaction, which is important for atmospheric and combustion chemistry. Complementing our recent work on quantifying the formation rate of the transient trans-DOCO radical, we report measurements of the kinetics of the activated product channel, D+CO2, at room temperature. Simultaneous measurements of the time-dependence of OD and CO2 concentrations allowed us to directly determine the formation rate, branching yield, and dependence on pressure and bath gas of t…
