在不同腔室压力下沉积碳膜时将光子能量刻蚀为结合能
Etching of Photon Energy into Binding Energy in Depositing Carbon Films at Different Chamber Pressures
AI总结：
本文研究热丝化学气相沉积中腔室压力对碳膜沉积的影响，发现压力变化通过改变气体活化、碰撞及原子氢对光子的刻蚀作用，调控碳原子向石墨态或金刚石态转变，从而影响碳膜形貌、结构和生长速率。
摘要：
热丝化学气相沉积是一种用于沉积多种应用碳膜的有吸引力的技术。在该技术中，研究腔室压力对碳膜沉积的影响也是可行的。在沉积腔室中，从甲烷前驱体解离后，气态碳原子首先转变为石墨态原子，然后转变为金刚石态原子。腔室压力的增加会改变所沉积碳膜的形貌和结构。通过将腔室压力从3.3 kPa提高到8.6 kPa，沉积碳膜的生长速率增加。气态碳原子转变为金刚石态原子的速率也随之增加。在11.3 kPa和14 kPa的腔室压力下，气态碳原子以高速率转变为石墨态原子。在不同的腔室压力下，气体活化和气体碰撞过程变化很大。碳膜的形貌和结构以不同的生长速率沉积。分子氢解离为原子氢的过程随腔室压力的变化而变化。原子氢刻蚀了从热丝释放的光子。因此，产生了不同形状的能量片段。气态碳原子在适当形状的能量片段作用下转变为石墨态和金刚石态原子。石墨态原子在相同的作用片段下结合，而金刚石态原子结合时情况并非如此。该研究为碳膜的沉积、表征和分析确立了新的趋势。
英文摘要：
A hot filament chemical vapor deposition is an attractive technique to deposit carbon films of different applications. In this technique, it is also feasible to study the influence of chamber pressure in the deposition of carbon films. In the deposition chamber, having dissociated from the methane precursor, gaseous carbon atoms first convert into the graphite state atoms and then into the diamond state atoms. An increase in the chamber pressure changes the morphology and structure of the deposited carbon films. The growth rate of the deposited carbon film increases by increasing the chamber pressure from 3.3 kPa to 8.6 kPa. The rate of converting gaseous carbon atoms into diamond atoms also increases. At 11.3 kPa and 14 kPa chamber pressure, gaseous carbon atoms convert into graphite state atoms at a high rate. The gas activation and gas collision processes vary broadly at varying chamber pressure. The morphology and structure of carbon films got deposited at different growth rates. The dissociation of molecular hydrogen into atomic hydrogen varies by varying the chamber pressure. Atomic hydrogen etched the photons released from the hot filaments. Thus, bits of differently shaped energy result. Gaseous carbon atoms convert into graphite and diamond state atoms under suitably shaped bits of energy. Graphite state atoms bind under the same involved bits, which is not the case when the diamond state atoms bind. The study sets a new trend in depositing, characterizing, and analyzing carbon films.
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