基于氧化铜纳米线的湿度传感器
Copper-oxide Nanowires based Humidity Sensor
摘要：
本文介绍了氧化铜纳米线作为湿度传感器的研究结果。采用热退火技术在SiO2衬底上的十字梳型金电极上制备了氧化铜纳米线薄膜，并通过金电极上的电阻研究了其湿敏特性。这些氧化铜纳米线薄膜显示出高灵敏度和长期稳定性，响应时间快。有人发现，在制作的传感器的金电极上的电阻随着湿度的增加几乎线性地在对数尺度上减小。可见氧化铜纳米线可用作低成本的湿度传感器，具有高输出可靠性和再现率。在室温（RT）和相对湿度（RH）为6%至97%的条件下进行观察。
英文摘要：
This paper presents investigated results of copper-oxide nanowires used as a humidity sensor. Copper-oxide nanowires films were grown over cross-comb type gold electrodes on a SiO2 substrate using thermal annealing technique, and its humidity sensitive characteristics were investigated through resistance across the gold electrodes. These copper-oxide nanowires films revealed high sensitivity and long-term stability with fast response time. It was found that resistance across gold electrodes of the fabricated sensor decreases with increase in humidity almost linearly on a logarithmic scale. It appears that copper-oxide nanowires can be used as low-cost humidity sensor with high output reliability and reproduction rate. The observations were carried out at room temperature (RT) and relative humidity (RH) in the range of 6% to 97%.
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