相变材料局部焦耳加热实现MEMS可编程机械共振
Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials
摘要：
报道了一种基于VO 2薄膜的可编程微机械谐振器。多个机械本征频率状态的编程使用焦耳加热作为本地电源，逐渐驱动相变的VO 2周围的金属-绝缘体转变温度。畴的相共存用于通过局部控制内应力和机械性能来调整器件的刚度。这项研究为开发机械可配置的纳米结构阵列开辟了前景。
英文摘要：
A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.
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