基于MEMS的离子加速器中RF加速单元的分级
Staging of RF-accelerating units in a MEMS-based ion accelerator
摘要：
多静电四极阵列直线加速器（MEQALAC）提供了一个机会，实现紧凑的射频（RF）加速器结构，可以提供非常高的束流。MEQALAC以前已经实现了加速间隙距离和厘米量级的光束孔径尺寸。通过微机电系统（MEMS）制造的进步，MEQALAC现在可以缩小到亚毫米级，并在晶圆衬底上批量加工。在本文中，我们展示了第一个结果，从使用三个RF阶段在一个紧凑的MEMS离子加速器。所呈现的结果示出了使用3x3小束布置和10 keV的惰性气体离子由印刷电路板形成的加速器结构的概念验证。我们提出了一个简单的模型来描述测量结果。然后，该模型被用来检查这种方法的一些方面，如对准误差的可能影响。我们还讨论了一些紧凑的MEQALAC的缩放行为。基于MEMS的方法能够实现低成本、高度通用的加速器，其覆盖广泛的束流能量和电流。应用包括离子束分析、质谱分析、材料处理，以及在非常高的束功率下的等离子体加热。
英文摘要：
Multiple Electrostatic Quadrupole Array Linear Accelerators (MEQALACs) provide an opportunity to realize compact radio-frequency (RF) accelerator structures that can deliver very high beam currents. MEQALACs have been previously realized with acceleration gap distances and beam aperture sizes of the order of centimeters. Through advances in Micro-Electro-Mechanical Systems (MEMS) fabrication, MEQALACs can now be scaled down to the sub-millimeter regime and batch processed on wafer substrates. In this paper, we show first results from using three RF stages in a compact MEMS-based ion accelerator. The results presented show proof-of-concept with accelerator structures formed from printed circuit boards using a 3x3 beamlet arrangement and noble gas ions at 10 keV. We present a simple model to describe the measured results. The model is then used to examine some of the aspects of this approach, such as possible effects of alignment errors. We also discuss some of the scaling behaviour of a compact MEQALAC. The MEMS-based approach enables a low-cost, highly versatile accelerator covering a wide range of beam energies and currents. Applications include ion-beam analysis, mass spectrometry, materials processing, and at very high beam powers, plasma heating.
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