球形微珠颗粒ALD包覆的流线型方法
A streamlined approach to particle ALD coating of spherical beads
摘要：
纳米颗粒的共形原子层沉积（ALD）是一种现已确立的纳米纤维概念，被许多研究人员用于诸如创建扩散屏障、调节催化或用生物相容性壳掩蔽有毒颗粒核的应用。为了用ALD保形地涂覆许多克的纳米颗粒，通常需要长的前体浸泡步骤、流化床、振动台或旋转进料器。虽然ALD技术的这些令人印象深刻的进步主导了颗粒ALD涂层的文献搜索，但这些方法可能导致比许多典型学术研究人员所需的更耗时或成本高昂的过程。因此，我们已经进行了这项研究，以探索静态平面ALD颗粒涂层的限制，最简单的方法，以ALD膜涂覆纳米粒子。使用Arradiance GEMStar 6 ALD系统，我们探索了一种快速简单的静态ALD颗粒涂覆工艺。我们的协议产生相对较小，但仍然在学术上有用，数量均匀的ALD涂层纳米球。这个过程可以放大到几十毫克到克范围内的纳米颗粒样品。我们已经证明，我们可以在8-10小时内实现二氧化硅或二氧化钛球形颗粒合成，然后在纳米颗粒上实现均匀的ALD涂层。化学合成的二氧化硅和二氧化钛纳米颗粒的直径可从50 nm调节至大于1微米。二氧化钛纳米颗粒的折射率可从约1.7至2.7调节。这份报告将是最有用的研究人员谁是新的粒子ALD，或谁想要实验与核心粒子共形覆盖ALD壳之前移动到一个更复杂，更高的吞吐量ALD方法。我们提供了颗粒合成，存储和ALD涂层的细节，以及与更传统的方法的比较。
英文摘要：
Conformal Atomic Layer Deposition (ALD) of nanoparticles is an now an established nanofabrication concept employed by many researchers for applications such as creating diffusion barriers, tuning catalysis, or masking a toxic particle core with a biocompatible shell. To conformally coat many grams of nanoparticles with ALD, long precursor soaking steps, fluidized beds, vibrating stages, or rotary feedthroughs are typically needed. While these impressive advancements in ALD techniques dominate literature searches of particle ALD coating, such methods may lead to a more time-intensive or cost-prohibitive process than what is required by many typical academic researchers. Thus we have performed this study to explore the limits of static planar ALD particle coating, the simplest method to coat nanoparticles with an ALD film. Using an Arradiance GEMStar6 ALD system, we have explored a fast and simple static ALD particle coating process. Our protocol produces relatively small, but still academically useful, quantities of uniformally ALD-coated nanospheres. This process can be scaled up to nanoparticle samples in the tens of milligram to gram range. We have demonstrated that we can achieve silica or titania spherical particle synthesis, and then uniform ALD coating on the nanoparticles, all within 8-10 hours. The diameter of the chemically synthesized silica and titania nanoparticles is tunable from 50 nm up to greater than a micron. The refractive index of the titania nanoparticles is tunable from approximately 1.7 to 2.7. This report will be most useful for researchers who are new to particle ALD, or who want to experiment with core particles conformally covered with ALD shells before moving to a more complicated, higher throughput ALD method. We provide details for particle synthesis, storage, and ALD coating along with a comparison to more conventional approaches.
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