Amorphous carbon films in direct current magnetron sputtering from regenerative sooting discharge

英文摘要：

We present results of carbon coatings on metal substrates in cylindrical hollow cathode (CHC) direct current magnetron sputtering. This is a new technique of making amorphous carbon film in CHC magnetron sputtering from regenerative sooting discharge. The carbon films are deposited on Cu and Al substrates in Ne atmosphere and compared with the films of carbon soot on the same materials produced from conventional arc discharge between graphite electrodes at 80 Angstrom in He background. The films are characterized using online emission, Raman, and Fourier transform infrared spectroscopy; X-ray diffraction (XRD) and Scanning electron microscopy (SEM). Raman spectroscopy reveals the existence of graphite and diamond like structures from arc discharge while in CHC magnetron sputtering, graphite like structures are dominant. XRD pattern from arc discharge show precipitates of Al4C3 of rhombohedral and hexagonal types in nanometer ranges for aluminum sample and probable formation of diamond and hexagonal carbon in copper whilst in magnetron sputtering we get amorphous carbon films. SEM images of surface show collection of loose agglomerates of carbon particles in arc discharge whereas for magnetron sputtering structures are regular with smooth edges and fine grains.