曲率半径为微米级的二氧化硅镜面模板的制备
Fabrication of mirror templates in silica with micron-sized radii of curvature
摘要：
我们提出了非常小半径的凹微光学器件的熔融石英基板上使用CO2激光烧蚀和随后的反应离子蚀刻的制造。该协议产生轴上近高斯凹陷的曲率半径$\lesssim5$微米在浅的深度和2埃的低表面粗糙度。这种几何形状是有吸引力的腔量子电动力学，小模式体积和低散射损耗是理想的。我们研究了可调谐法布里-珀罗型微腔中结构的光学性能，证明了近涂层限制的损耗率（F = 25，000）和与其几何尺寸一致的小焦距。
英文摘要：
We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of curvature $\lesssim5$ microns at shallow depth and low surface roughness of 2 angstroms. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structure within a tunable Fabry-Perot type microcavity, demonstrate near-coating-limited loss rates (F = 25,000) and small focal lengths consistent with their geometrical dimensions.
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