用于高分辨率高能共焦X射线荧光显微术的锗准直微通道阵列
Germanium Collimating micro-Channel Arrays For High Resolution, High Energy Confocal X-ray Fluorescence Microscopy
摘要：
共焦X射线荧光显微镜（CXRF）允许直接检测来自扩展的未稀释样品的微米级3D体积的X射线荧光。我们以前已经证明了使用一种新的收集光学，由硅制成，提高了空间分辨率，这种方法的数量级超过CXRF使用多毛细管。光学，称为准直通道阵列（CCA），由微米级，光刻制造的准直通道阵列，所有指向一个单一的源位置。由于硅的吸收能力有限，这些光学器件的有用能量范围限于低于约10 keV的荧光发射。在这里，我们报告制造的CCA从锗基板，并证明其实际用途CXRF高达20千电子伏。具体而言，我们证明了一个几乎能量无关的临界空间分辨率$d_R$的2.1 $\pm$ 0.17 \um从2-20千电子伏，以及优秀的背景减少相比，硅基CCA在整个能量范围。描述了光学和背景减少保持器的设计细节。两个版本的光学现在可根据要求在光束线20 ID-B，先进的光子源（APS）-阿贡国家实验室。
英文摘要：
Confocal x-ray fluorescence microscopy (CXRF) allows direct detection of x-ray fluorescence from a micron-scale 3D volume of an extended, unthinned sample. We have previously demonstrated the use of a novel collection optic, fabricated from silicon, that improves the spatial resolution of this approach by an order of magnitude over CXRF using polycapillaries. The optic, called a collimating channel array (CCA), consists of micron-scale, lithographically-fabricated arrays of collimating channels, all directed towards a single source position. Due to the limited absorbing power of silicon, the useful energy range of these optics was limited to fluorescence emission below about 10 keV. Here, we report fabrication of CCAs from germanium substrates, and demonstrate their practical use for CXRF up to 20 keV. Specifically we demonstrate a nearly energy-independent critical spatial resolution $d_R$ of 2.1$\pm$0.17 \um from 2-20 keV, as well as excellent background reduction compared to silicon-based CCAs throughout this energy range. Design details of the optic and background-reduction holder are described. Two versions of the optic are now available upon request at the beamline 20ID-B, Advanced Photon Source (APS) - Argonne National Laboratory.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
