紫外光电效应增强电子显微镜的对比度和分辨率
UV-photoelectric effect for augmented contrast and resolution in electron microscopy
摘要：
一种新的工具，提供材料对比度控制扫描电子显微镜（SEM）的演示。该方法基于SEM成像期间的深紫外照明，并且由于光电效应而提供了基于对比度的新型材料以及更高的分辨率。从被照射的样品表面释放的电子有助于成像，其可以以更快的采集速率进行，提供材料选择性对比度，减少由表面充电引起的失真，并且可以替代SEM中的金属涂层。这些功能提供了高保真的SEM成像，预计将显着提高电子束仪器的性能，以及打开新的机会，成像和表征的材料在纳米级。
英文摘要：
A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution due to the photoelectric effect. Electrons liberated from illuminated sample surface contribute to the imaging which can be carried out at a faster acquisition rate, provide material selective contrast, reduce distortions caused by surface charging, and can substitute metal coating in SEM. These features provide high fidelity SEM imaging and are expected to significantly improve the performance of electron beam instruments as well as to open new opportunities for imaging and characterization of materials at the nanoscale.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
