通过电压波形剪裁实现电容耦合等离子体中离子通量-能量分布函数的定制
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
摘要：
提出了一种在电容耦合等离子体电极表面的离子通量能量分布函数（IDF）中产生不同能量的单峰的方法。该技术基于驱动电压波形的定制，即调整所施加的谐波的相位和幅度，以优化由电荷交换碰撞产生的离子的积累以及它们随后由鞘层电场加速。可以通过调整所施加的RF电压波形的参数在宽域中控制峰的位置（即离子能量）和离子在IDF的峰内的通量，从而允许优化其中在特定离子能量下诱导表面反应的各种应用。
英文摘要：
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform, i.e. adjusting the phases and amplitudes of the applied harmonics, to optimize the accumulation of ions created by charge exchange collisions and their subsequent acceleration by the sheath electric field. The position of the peak (i.e. the ion energy) and the flux of the ions within the peak of the IDF can be controlled in a wide domain by tuning the parameters of the applied RF voltage waveform, allowing optimization of various applications where surface reactions are induced at particular ion energies.
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