纳秒级Laser加热条件下颗粒表面化学气相沉积过程中的传热传质
Heat and Mass Transfer during Chemical Vapor Deposition on the Particle Surface Subjected to Nanosecond Laser Heating
摘要：
本文提出了纳秒激光脉冲作用下球形颗粒表面化学气相沉积氮化钛（TiN）的热模型。本文对单个球形金属粉末颗粒表面在时间高斯热流作用下的传热传质进行了解析研究。还考虑了颗粒表面的化学反应和气相中的传质。研究了不同激光能量密度、脉冲宽度、粒子初始温度和粒子半径条件下的表面温度、热穿透深度和沉积膜厚度。研究了反应室总压对沉积速率的影响。本文提出的粒子级模型是LCVI多尺度模型发展的重要一步。
英文摘要：
A thermal model of chemical vapor deposition of titanium nitride (TiN) on the spherical particle surface under irradiation by a nanosecond laser pulse is presented in this paper. Heat and mass transfer on a single spherical metal powder particle surface subjected to temporal Gaussian heat flux is investigated analytically. The chemical reaction on the particle surface and the mass transfer in the gas phase are also considered. The surface temperature, thermal penetration depth, and deposited film thickness under different laser fluence, pulse width, initial particle temperature, and particle radius are investigated. The effect of total pressure in the reaction chamber on deposition rate is studied as well. The particle-level model presented in this paper is an important step toward development of multiscale model of LCVI.
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