幅度和相位光束整形，实现侧壁角度检测的最高灵敏度
Amplitude and phase beam shaping for the highest sensitivity in side-wall angle detection
摘要：
在光学计量学中，光栅状结构被用作评估光刻技术性能的工具。特别是，几个形状参数表征这些结构。其中之一，称为侧壁角，遭受相当高的误差估计。使用数学优化，我们研究了一个适当形状的光束是否可以增加检测这个角度的微小变化的能力。本文描述了用于计算优化光束的理论公式，并将其性能与平面波的情况进行了比较。我们发现，灵敏度随着倾斜角的增加而降低，但即使如此，其趋势也优于平面波的情况。不过，这样的优化过程需要扩展到更一般的矢量情况。
英文摘要：
In optical metrology, grating-like structures are used as tools to evaluate the performance of lithographic techniques. In particular, several shape parameters characterize those structures. One of them, termed side-wall angle, suffers from a considerable high error estimation. Using mathematical optimization, we investigated whether a properly shaped beam could increase the ability to detect tiny changes of this angle. This paper describes the theoretical formulation used to calculate the optimized beam and compares its performance with the case of a plane wave. We found that the sensitivity decreases with increasing slope angles, but even so its trend is better than in the plane wave case. Still, such an optimization process needs to be extended to the more general vectorial case.
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