高阶微带滤波器的自动调谐
Automatic Resonance Alignment of High-Order Microring Filters
摘要：
利用反馈系统在高阶串联耦合微带滤波器中进行自动谐振对准调谐。通过仅输入参考波长，调谐滤波器，使得与初始失谐状态相比，通带波纹显著减小，并且通带变为以参考为中心。该方法进行了测试，在标准的硅光子铸造工艺中制造的5阶云母滤波器。可重复的调谐被证明为多个模具从晶圆上的过滤器和任意参考波长内的自由光谱范围内的微环。
英文摘要：
Automatic resonance alignment tuning is performed in high-order series coupled microring filters using a feedback system. By inputting only a reference wavelength, a filter is tuned such that passband ripples are dramatically reduced compared to the initial detuned state and the passband becomes centered at the reference. The method is tested on 5th order microring filters fabricated in a standard silicon photonics foundry process. Repeatable tuning is demonstrated for filters on multiple dies from the wafer and for arbitrary reference wavelengths within the free spectral range of the microrings.
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