尺寸和化学计量控制的氧化钛纳米颗粒的合成
Synthesis of titanium-oxide nanoparticles with size and stoichiometry control
摘要：
采用空心阴极溅射法在Ar-O2气氛中利用高功率脉冲合成了Ti-O纳米粒子。它示出的化学计量和纳米粒子的尺寸可以独立地变化，前者通过控制O2气体流量和后者通过独立的偏置的两个单独的阳极在生长区。纳米粒子的直径在25至75 nm的范围内，并具有不同的Ti-O组合物和晶相，已被合成。
英文摘要：
Ti-O nanoparticles have been synthesized via hollow cathode sputtering in an Ar-O2 atmosphere using high power pulsing. It is shown that the stoichiometry and the size of the nanoparticles can be varied independently, the former through controlling the O2 gas flow and the latter by the independent biasing of two separate anodes in the growth zone. Nanoparticles with diameters in the range of 25 to 75 nm, and with different Ti-O compositions and crystalline phases, have been synthesized.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
