使用脉冲DBD等离子体处理PDMS表面：比较不同气体的使用及其对粘附的影响
Treatment of PDMS surfaces using pulsed DBD plasmas: comparing the use of different gases and its influence on adhesion
摘要：
在这项工作中，我们提出了一些使用脉冲介质阻挡放电等离子体的聚二甲基硅氧烷（PDMS）表面的处理结果。比较使用不同气体和混合物（氩气、氩气加水蒸气、氦气、氦气加水蒸气、氮气和氮气加水蒸气）的等离子体处理的结果，测试每种等离子体的两个PDMS样品之间的粘附性。我们还研究了水的接触角的等离子体处理时间的PDMS表面与每种等离子体处理的函数。等离子体的特征在于通过光学发射光谱（OES），以确定发射的物种，并确定等离子体温度。通过比较OES获得的光谱与SpecAir模拟代码生成的光谱，估计每个过程的等离子体温度。还进行了输送到等离子体的功率的测量。作为结果，当施加长暴露时间（大于150秒）时，使用不同气体的所有工艺在PDMS样品之间显示出良好的粘附功效。然而，当只有少数放电施加到PDMS样品的氦等离子体过程呈现出最好的结果。原子力显微镜（AFM）分析的PDMS样品与氦等离子体处理表明，减少表面粗糙度，这增加了表面接触面积，提高了附着力。
英文摘要：
In this work we present some results of the treatment of polydimethylsiloxane (PDMS) surfaces using pulsed dielectric barrier discharge plasmas. The results of plasma treatment using different gases and mixtures, argon, argon plus water vapor, helium, helium plus water vapor, nitrogen and nitrogen plus water vapor, were compared testing the adhesion between two PDMS samples for each kind of plasma. We also studied the water contact angle in function of plasma process time of PDMS surfaces with each kind of plasma treatment. The plasma was characterized by optical emission spectroscopy (OES) to identify the emitting species and determine the plasma temperatures. The plasma temperature for each process was estimated comparing the spectrum obtained by OES with the spectrum generated by SpecAir simulation code. Measurements of power delivered to the plasmas were also performed. As the results, all the process using different gases show good adhesion efficacy between PDMS samples when long exposure time (larger than 150 seconds) is applied. However, when only a few discharges are applied to PDMS samples the helium plasma process presented best results. Atomic Force Microscopy (AFM) analysis of PDMS samples treated with helium plasma showed reduction in the surface roughness, which increase the surface contact area and improves the adhesion.
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