利用可分解聚合物实现纳米光子器件的荧光集成
Fluidic Integration of Nanophotonic Devices Using Decomposable Polymers
摘要：
基于聚乙烯的可分解聚合物可以用紫外线或电子束辐射图案化，用于创建微米级的流体通道。氮化硅衬底用于制造在光谱的可见光范围内操作的纳米光子波导和谐振器。通过氧化物包层热分解聚合物产生的荧光通道用于将超少量的荧光样品传递到光学传感器。
英文摘要：
Polynorbornene-based decomposable polymer which can be patterned with ultraviolet or electron-beam radiation is used to create micrometer-scale fluidic channels. Silicon nitride substrates are used to fabricate nanophotonic wavegide and resonators operating in the visible range of the spectrum. Fluidic channels generated by thermally decomposing the polymer through the oxide cladding is used to deliver ultra-small amounts of florescent samples to the optical sensors.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
