分析方法REM/EDX、AES和SNMS在铝氯腐蚀中的应用
Application of the analytical methods REM/EDX, AES and SNMS to a chlorine induced aluminium corrosion
摘要：
扫描电子显微镜- SEM-能量色散X射线检测- EDX -，俄歇电子能谱- AES -和溅射中性质谱- SNMS -已被用来表征铝金属化的氯诱导腐蚀。SEM/EDX检测到的特征X射线是发射的前几个微米以下的试样表面后，内壳电离的初级电子。AES检测在样品的最顶层原子层内产生的交替喷射的俄歇电子。为了获得元素浓度深度分布，通过离子溅射去除表面层。AES检测剩余表面的成分，而SNMS测量溅射通量，并且不会受到优先溅射的影响。如氯引起的铝腐蚀的例子所示，这些分析方法在定量、化学信息和信息深度方面是互补的。只有通过同时使用，测量伪影才能被检测到，并能够从解释中排除。
英文摘要：
Scanning electron microscopy - SEM - with energy dispersive X-ray detection - EDX -, Auger electron spectroscopy - AES - and sputtered neutral mass spectrometry - SNMS - have been used to characterize a chlorine induced corrosion of an aluminium metallisation. SEM/EDX detects the characteristic X-rays that are emitted from the first few micrometers beneath the specimens surface after inner shell ionisation by the primary electrons. AES detects the alternatively ejected Auger electrons that are generated within the topmost atomic layers of the sample. To obtain elemental concentration depth profiles, the surface layers are removed by ion sputtering. Whereas AES detects the composition of the remaining surface, SNMS measures sputtered fluxes and does not suffer from preferential sputtering. As demonstrated by the example of a chlorine induced aluminium corrosion, these analytical methods are complementary with respect to quantification, chemical information and information depth. Only by simultaneous use measuring artefacts are detectable and able to be excluded from interpretation.
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