具有非金属化纳米梁的电路机电学
Circuit Electromechanics with a Non-Metallized Nanobeam
摘要：
我们已经实现了一个纳米机电混合系统组成的氮化硅梁介电耦合到超导微波谐振器。我们利用强驱动光束的Duffing非线性来表征样品。特别是，我们校准的振幅谱的机械运动，并确定机电真空耦合。在0.5 K时，在14 MHz的谐振频率下，获得了480，000的高品质因数.实验确定的机电真空耦合11.5兆赫的定量比较与有限元模型计算。
英文摘要：
We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480,000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.
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