控制电弧源的异常阴极腐蚀模式
Unusual Cathode Erosion Patterns Observed for Steered Arc Sources
摘要：
研究了具有磁控管型磁场的阴极弧源的稳定性、腐蚀性以及与线性宏观粒子过滤器的兼容性。在这里，我们报告了不寻常的弧斑侵蚀模式，这是狭窄的（~ 2毫米）与周期性坑时，在氩气和氧气的混合物中操作时，和广泛的（~ 10毫米）与周期性的凹槽和脊。这些观察结果可以分别与类型2和类型1电弧点的点火概率相关。
英文摘要：
A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusual arc spot erosion patterns, which were narrow (~ 2 mm) with periodic pits when operating in argon, and broad (~ 10 mm) with periodic groves and ridges when operating in an argon and oxygen mixtures. These observations can be correlated with the ignition probability for type 2 and type 1 arc spots, respectively.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
