基于半导体微管的三轴霍尔传感器
Three-axis Hall transducer based on semiconductor microtubes
摘要：
研制了一种基于GaAs/AlGaAs/InGaAs微管的三轴霍尔传感器。证明了用这种传感器同时测量所有三个磁场分量的可能性。还表明可以用聚二甲基硅氧烷包装换能器的独立部件，以保护这些部件免受机械作用的影响。
英文摘要：
A three-axis Hall transducer based on GaAs/AlGaAs/InGaAs microtubes has been fabricated. The possibility of simultaneous measurement of all the three magnetic field components with such a transducer was demonstrated. It was also shown possible to pack the free-standing parts of the transducer with polydimethylsiloxane for protection of those parts from mechanical actions.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
