LA和ULA水平α-雌二醇测量值的变异性来源，一项多中心研究
Sources of Variability in Alpha Emissivity Measurements at LA and ULA Levels, a Multicenter Study
摘要：
α发射率测量在半导体工业中对于评估材料在生产过程中的适用性是重要的。最近发表的一项循环研究，将相同的样本循环到几个α计数中心，显示出测量的α发射率的中心到中心的变化很大。对这些结果的单独分析假设，大部分变化可能来自样品与入射窗间隔的差异。XIA最近推出了一种超低本底计数器UltraLo-1800（UltraLo），其工作方式与原始研究中大多数中心使用的正比计数器完全不同。特别是，通过将样品放置在计数体积内，它消除了上述样品与入射窗分离的问题，因此提供了测试该假设的机会。在这项工作中，我们简要地回顾了UltraLo如何运作，并描述了一个新的循环研究，完全使用一组标准样品，其中包括两个样品中使用的原始研究UltraLo仪器进行。本研究表明，对于LA（2 - 50 α/khr-cm $^2$之间的低α）样本测量值，仅剩余的研究中心间差异是由于计数统计所致。与早期研究相比，ULA（超低Alpha < 2 alpha/khr-cm $^2$）样本测量值的变化减少了三倍，测量结果表明残余活性变化现在主要源于站点之间的差异宇宙起源背景。
英文摘要：
Alpha emissivity measurements are important in the semiconductor industry for assessing the suitability of materials for use in production processes. A recently published round-robin study that circulated the same samples to several alpha counting centers showed wide center-to-center variations in measured alpha emissivity. A separate analysis of these results hypothesized that much of the variation might arise from differences in sample-to-entrance window separations. XIA recently introduced an ultra low background counter, the UltraLo-1800 (UltraLo), that operates in a fundamentally different manner from the proportional counters used at most of the centers in the original study. In particular, by placing the sample within the counting volume, it eliminates the sample-to-entrance window separation issue noted above, and so offers an opportunity to test this hypothesis. In this work we briefly review how the UltraLo operates and describe a new round-robin study conducted entirely on UltraLo instruments using a set of standard samples that included two samples used in the original study. This study shows that, for LA (Low Alpha between 2 and 50 alpha/khr-cm$^2$) sample measurements, the only remaining site-to-site variations were due to counting statistics. Variations in ULA (Ultra-Low Alpha < 2 alpha/khr-cm$^2$) sample measurements were reduced three-fold, compared to the earlier study, with the measurements suggesting that residual activity variations now primarily arise from site-to-site differences in the cosmogenic background.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
