低温下MEMS金属涂层的应力、弹性和非线性耗散
Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation
摘要：
我们提出了在低温下进行的机械测量基于MEMS的微机电结构（MEMS）涂有金属层。两个非常不同的涂层，以说明本方法的能力，即（软）铝和（硬）铌氧化物。温度被用作访问材料属性的控制参数。我们受益于低温技术，以提取在低温真空中的第一机械谐振模式的相位分辨测量。通过对相同样品重复实验，在多次金属沉积之后，我们可以准确地确定涂层对表面应力、附加质量、附加弹性和阻尼方面的机械性能的贡献。解析理论表达式推导并用于拟合数据。利用该技术提供的极宽的动态范围，我们可以测量薄金属膜的滞弹性。描述金属的动力学的关键参数进行了分析，以提供新的实验基础，为未来的理论建模的基础机制。
英文摘要：
We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of the present approach, namely (soft) aluminum and (hard) niobium oxide. The temperature is used as a control parameter to access materials properties. We benefit from low temperature techniques to extract a phase-resolved measurement of the first mechanical resonance mode in cryogenic vacuum. By repeating the experiment on the same samples, after multiple metallic depositions, we can determine accurately the contribution of the coating layers to the mechanical properties in terms of surface stress, additional mass, additional elasticity and damping. Analytic theoretical expressions are derived and used to fit the data. Taking advantage of the extremely broad dynamic range provided by the technique, we can measure the anelasticity of the thin metallic film. The key parameters describing the metals' dynamics are analyzed in an original way in order to provide new experimental grounds for future theoretical modelings of the underlying mechanisms.
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