适用于所有激励波形和振幅以及所有碰撞水平的代数RF鞘层模型
An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality
摘要：
低温等离子体的边界鞘层通常仅占其体积的一小部分，但对宏观行为的许多方面负责。因此，深入了解鞘层动力学具有重要的理论和实际意义。这项工作集中在所谓的“代数”方法，该方法力求以封闭的分析形式描述RF调制边界鞘层的电气行为，即，而不需要解微分方程。一个数学上简单的，分析表达式的电荷-电压关系的鞘层，适用于所有的激励波形和振幅，并涵盖所有制度，从碰撞为主的运动在低气压下的气体高压。与自洽粒子模拟的结果进行了比较。
英文摘要：
The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough understanding of the sheath dynamics is therefore of theoretical and practical importance. This work focusses on the so-called "algebraic" approach which strives to describe the electrical behavior of RF modulated boundary sheaths in closed analytical form, i.e., without the need to solve differential equations. A mathematically simple, analytical expression for the charge-voltage relation of a sheath is presented which holds for all excitation wave forms and amplitudes and covers all regimes from the collision-less motion at low gas pressure to the collision dominated motion at gas high pressure. A comparison with the results of self-consistent particle-in-cell simulations is also presented.
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