电力MEMS用低频厚绝缘膜片的开发
Development of low frequencies, insulating thick diaphragms for power MEMS applications
摘要：
微型热机的主要挑战是在滑动活塞的情况下的热绝缘和机械公差。在微型发动机中从活塞转换到薄膜可以缓解最新的情况，并导致平面结构。然而，热隔离将需要非常厚的结构，这与过高的谐振频率相关联，这对发动机性能是有害的。需要在热和机械方面进行折衷。相反，基于流体结构相互作用，使用包含在由可变形隔膜密封的腔体中的不可压缩流体，可以设计出厚的低频绝缘隔膜。该设计涉及简单的平面几何形状，易于用标准微电子方法制造。提出了一种解析的流体结构模型，并进行了理论验证。实验结构的实现和测试。该模型与实验结果吻合较好。提出了一种用于微机械混合流体结构设计的无量纲模型。
英文摘要：
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures. However, the thermal isolation would call for very thick structures which are associated to too high resonant frequencies which are detrimental to the engine performances. A thermal and mechanical compromise is to be made. On the contrary, based on fluid structure interaction, using an incompressible fluid contained in a cavity sealed by deformable diaphragm it would be possible to design a thick, low frequency insulating diaphragm. The design involves a simple planar geometry that is easy to manufacture with standard microelectronics methods. An analytical fluid structure model is proposed and theoretically validated. Experimental structures are realized and tested. The model is in agreement with the experimental results. A dimensionless model is proposed to design hybrid fluid structures for micromachines.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
