作为弯曲晶体光谱仪色散元件的蚀刻多层膜：实现和性能
An etched multilayer as a dispersive element in a curved-crystal spectrometer: implementation and performance
摘要：
通过在干涉多层反射镜内形成层状光栅图案而获得的蚀刻多层膜用于软X射线范围以提高配备有周期性多层膜的波长色散光谱仪的光谱分辨率。我们描述了这样一个蚀刻的多层色散元件的制造过程中，其特征通过反射率测量和模拟，其实施在一个高分辨率的约翰型光谱仪。专门设计的图案化的Mo/B4 C多层膜被发现富有成效的C K发射的范围内的衍射图案缩小了一个因素4相对于非蚀刻结构。这种色散元件具有改进的光谱分辨率，成功地实现了电子结构的研究与改进的光谱分辨率的X射线发射光谱。作为第一个结果，我们提出了不同的化合物，如石墨，SiC和B_4C中的碳原子的化学状态之间的区别，由它们的C K发射带的不同形状。
英文摘要：
Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft x-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic multilayers. We describe the fabrication process of such an etched multilayer dispersive element, its characterization through reflectivity measurement and simulations, and its implementation in a high-resolution Johann-type spectrometer. The specially designed patterning of a Mo/B4C multilayer is found fruitful in the range of the C K emission as the diffraction pattern narrows by a factor 4 with respect to the non-etched structure. This dispersive element with an improved spectral resolution was successfully implemented for electronic structure study with an improved spectral resolution by x-ray emission spectroscopy. As first results we present the distinction between the chemical states of carbon atoms in various compounds, such as graphite, SiC and B4C, by the different shape of their C K emission band.
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