亚微米宽超导共面波导谐振腔的功率处理和响应特性
Power Handling and Responsivity of Submicron Wide Superconducting Coplanar Waveguide Resonators
摘要：
基于共面波导（CPW）的微波动力学电感探测器（MKID）的灵敏度需要至少提高一个数量级，以满足天基太赫兹天文学的要求。我们的目标是研究这是否可以通过将CPW的宽度减小到远低于通常使用光学光刻（> 1 μm）来实现。利用电子束光刻和反应离子刻蚀技术在NbTiN中制作了中心线宽为300 nm的共面波导谐振器。在一个系统的研究四分之一波长CPW谐振器具有不同的宽度，它示出的响应度，噪声和功率处理的行为作为宽度的函数继续下降到300 nm。这鼓励了使用Al的窄KID的开发，以提高其灵敏度。
英文摘要：
The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 μm). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. In a systematic study of quarter-wave CPW resonators with varying widths it is shown that the behavior of responsivity, noise and power handling as a function of width continues down to 300 nm. This encourages the development of narrow KIDs using Al in order to improve their sensitivity.
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