压电驱动双晶片原子力显微镜探针动态行为的状态反馈控制
State Feedback Control for Adjusting the Dynamic Behavior of a Piezoactuated Bimorph Atomic Force Microscopy Probe
摘要：
我们使用状态反馈控制器调整压电驱动双晶片原子力显微镜（AFM）探针的瞬态动力学。这种方法使我们能够同时调整探头的品质因数和谐振频率。首先，我们首先调查反馈增益对探针的动态响应的影响，然后表明，可以通过降低其品质因数和/或增加其谐振频率，以减少扫描误差，在轻敲模式AFM的探针的时间常数。
英文摘要：
We adjust the transient dynamics of a piezo-actuated bimorph Atomic Force Microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced by reducing its quality factor and/or increasing its resonance frequency to reduce the scan error in tapping mode AFM.
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