嵌段共聚物微结构在角几何中的有序化
Ordering of block copolymer microstructures in corner geometries
摘要：
将嵌段共聚物有序化为层状微结构是一种有吸引力的途径，用于在太小而不能通过当前光刻技术构建的尺度上创建纳米粒子。这利用了一种称为图形外延的技术，其中使用形貌来定义图案的对准，以精确放置图案特征。这种方法的一个问题是，由于几何挫折，laminate无法保持拐角周围的连续性。我们使用扩展的Cahn-Hilliard方程的模拟结果表明，这个问题可以通过使用圆角来解决。
英文摘要：
The ordering of block copolymers into lamellar microstructures is an attractive route for creating nanopatterns on scales too small to be constructed by current photolithography techniques. This utilises a technique known as graphoepitaxy where topography is used to define the alignment of the pattern for precise placement of pattern features. One problem with this approach is the failure of lamellae to maintain continuity around corners, due to geometrical frustration. We report simulation results using the extended Cahn-Hilliard equation which suggest that this problem could be solved by using rounded corners.
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