机械应力下TiN-coated单片硅PIN二极管阵列的性能
Performance of a TiN-coated monolithic silicon pin-diode array under mechanical stress
摘要：
卡尔斯鲁厄氚中微子实验（KATRIN）将使用高度分段的单片硅pin二极管焦平面探测器（FPD）探测通过其电磁光谱仪的氚β衰变电子。该pin二极管阵列将位于一块500 μ m厚的硅上，氮化钛（TiN）涂层探测器像素与弹簧针制成的前端电子器件之间存在接触。弹簧针将在探测器上施加高达50 N的总作用力，使其变形，并在硅块中产生高达50 MPa的机械应力。我们已经评估了一个原型pin二极管阵列与弹簧针连接方案类似的KATRIN FPD。我们发现，弹簧针使良好的电接触TiN和观察检测器的分辨率或反向偏置漏电流，这可以归因于机械应力没有影响。
英文摘要：
The Karlsruhe Tritium Neutrino Experiment (KATRIN) will detect tritium beta- decay electrons that pass through its electromagnetic spectrometer with a highly- segmented monolithic silicon pin-diode focal-plane detector (FPD). This pin-diode array will be on a single piece of 500-μm-thick silicon, with contact between titanium nitride (TiN) coated detector pixels and front-end electronics made by spring-loaded pogo pins. The pogo pins will exert a total force of up to 50N on the detector, deforming it and resulting in mechanical stress up to 50 MPa in the silicon bulk. We have evaluated a prototype pin-diode array with a pogo-pin connection scheme similar to the KATRIN FPD. We find that pogo pins make good electrical contact to TiN and observe no effects on detector resolution or reverse-bias leakage current which can be attributed to mechanical stress.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
