短时间通信：用于驻极体振动能量采集器的稳定DRIE图案化SiO2/Si3N4驻极体
Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters
摘要：
本文是关于一种新的制造工艺，旨在开发稳定的SiO2/Si 3 N4图案化驻极体使用深反应离子蚀刻（DRIE）的步骤，应用于驻极体振动能量收集器（VEH）。通过正电晕放电充电的驻极体表现出出色的稳定性，具有高表面电荷密度，在1.1 \mum厚的层上可达到5 mC/m^{2}，即使具有精细图案（低至25 \mum）和恶劣的温度条件（高达250°C），也为新的驻极体VEH设计和制造工艺铺平了道路。
英文摘要：
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret Vibration Energy Harvesters (VEH). Electrets charged by a positive corona discharge show excellent stability with high surface charge density that can reach 5mC/m^{2} on 1.1\mum-thick layers, even with fine patterning (down to 25\mum) and harsh temperature conditions (up to 250°C), paving the way to new electret VEH designs and manufacturing processes.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
