单折射棱镜偏振控制全息光刻
Polarization manipulation holographic lithography by single refracting prism
摘要：
提出了一种简单有效的单折射棱镜偏振操纵全息光刻方法。在传统的全息光刻技术中，需要调制多束光，而通过调节单束光的偏振态，我们可以简单地得到一个药丸状的干涉图样。以单光束单次全息光刻法制备大面积二维聚合物光子晶体模板为例进行了研究。例如，这种集成制造技术可以释放施加在多光束全息光刻上的关键稳定性限制。
英文摘要：
We propose a simple but effective strategy for polarization manipulation holographic lithography by single refractive prism. By tuning the polarization of single laser beam, we simply obtain a pill shape interference pattern where multiple modulated beams are needed in conventional holography lithography. Fabrication of large area pill shape two-dimensional polymer photonic crystals template using one beam and one shoot holography lithography is shown as an example. This integrated fabrication technique, for example, can release the crucial stability restrictions imposed on the multiple beams holography lithography.
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