聚焦离子束加工金刚石--表面损伤与修复
Diamond Processing by Focused Ion Beam - Surface Damage and Recovery
摘要：
金刚石中的氮空位色心（NV-）在新型光子学应用中具有重要意义。金刚石纳米光子结构通常使用聚焦离子束（FIB）处理来实现，留下对色心发光具有不利影响的受损表面。利用飞行时间二次离子质谱（TOF-SIMS）和光致发光（PL）研究了FIB处理对单晶金刚石表面及其光子学特性的影响。将处理过的表面暴露于氢等离子体，然后进行化学蚀刻，大大降低了注入的Ga浓度，导致NV-光电发射的恢复和NV-/NV 0比的显著增加。
英文摘要：
The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a detrimental effect on the color center luminescence. The FIB processing effect on single crystal diamond surfaces and their photonic properties is studied by Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and photoluminescence (PL). Exposing the processed surface to hydrogen plasma, followed by chemical etching, drastically decreases implanted Ga concentration, resulting in a recovery of the NV- photo-emission and in a significant increase of the NV-/NV0 ratio.
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