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arXiv 1107.3170physics.opticscond-mat.mes-hall
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用于光机的机械柔性光栅反射器

Mechanically Compliant Grating Reflectors for Optomechanics

Utku Kemiktarak, Michael Metcalfe, Mathieu Durand, John Lawall

摘要:

我们展示了微机械反射器的反射率高达99.4%,机械品质因数Q高达7.8*10^5的光学机械应用。反射器是氮化硅薄膜图案与亚波长光栅结构,避免了需要许多介电层中使用的传统镜子。我们已经采用反射器的结构中的法布里-珀罗腔的精细度高达F=1200,并使用的光学响应来探测膜的机械性能。通过驱动腔与光失谐到腔谐振的高频侧,我们创建一个光学反阻尼力,导致反射器在211 kHz自振荡。

英文摘要:

We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8*10^5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F=1200, and used the optical response to probe the mechanical properties of the membrane. By driving the cavity with light detuned to the high-frequency side of a cavity resonance, we create an optical antidamping force that causes the reflector to self-oscillate at 211 kHz.

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