纳米压印用天然荷叶表面疏水无机涂层的制备
Fabrication of hydrophobic inorganic coatings on natural lotus leaves for nanoimprint stamps
摘要：
采用离子束溅射沉积技术，在天然荷叶表面直接沉积铜或硅，获得疏水性无机薄膜。扫描电子显微镜观察表明，荷叶状的表面结构的沉积的无机膜。与沉积在平坦硅基底上的无机膜相比，沉积在荷叶上的无机膜的疏水性得到了改善。在荷叶状铜和硅薄膜上测得的水接触角分别为136.3 \pm 8°和117.8 \pm 4.4°。将疏水性荷叶状无机薄膜作为纳米压印模板进行了重复使用。在聚苯乙烯抗蚀剂层上得到了荷叶状的无机薄膜负性结构。
英文摘要：
Hydrophobic inorganic films were obtained by direct deposition of copper or silicon onto natural lotus leaves by ion beam sputtering deposition technique. Scanning electron microscopy observations showed a lotus-leaf-like surface structure of the deposited inorganic films. Hydrophobic nature of the inorganic films on lotus leaves had been improved compared to the inorganic films deposited on flat silicon substrates. Water contact angles measured on the lotus-leaf-like copper and silicon films were 136.3 \pm 8° and 117.8 \pm 4.4°, respectively. The hydrophobic lotus-leaf-like inorganic films had been repeated used as nanoimprint stamps. Negative structures of lotus-leaf-like inorganic films were obtained on the polystyrene resist layers.
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