阳极氧化铝中六方有序纳米孔的制备：一种替代的预处理方法
Fabrication of hexagonally ordered nanopores in anodic alumina: An alternative pretreatment
摘要：
阳极氧化铝（AAO）或含有六边形有序纳米孔的阳极氧化铝模板在过去十年中已被广泛用于开发许多功能纳米结构，例如纳米级传感器、计算网络和存储器。长程孔序要求起始铝表面极其光滑。电解抛光是阳极氧化之前最常用的表面平坦化方法。虽然普遍，这种方法有几个限制方面的吞吐量，抛光面积和特殊的实验设置的要求，这引入了额外的速度瓶颈，在本质上缓慢的AAO基纳米加工工艺。在这项工作中，我们报告了新一代的所谓的“化学抛光”的方法，绕过这些绊脚石在预处理阶段，并提供了一个可行的，更简单，更安全，更快的替代电解抛光。在不牺牲最终AAO模板的质量的情况下获得这些益处。在这项工作中，我们已经（a）确定了化学抛光的最佳参数制度和（b）确定的工艺条件，一种新的平行纳米脊配置自组装和延伸超过几微米的距离。这种图案可以用作制造纳米交叉条的掩模，纳米交叉条是无数纳米级存储器和交叉点架构中的主要结构组件。
英文摘要：
Anodic aluminum oxide (AAO) or anodic alumina template containing hexagonally ordered nanopores has been widely used over the last decade for the development of numerous functional nanostructures such as nanoscale sensors, computing networks and memories. The long range pore order requires the starting aluminum surface to be extremely smooth. Electropolishing is the most commonly used method for surface planarization prior to anodization. While prevalent, this method has several limitations in terms of throughput, polishing area and requirement of special experimental setups, which introduce additional speed bottlenecks in the intrinsically slow AAO-based nanofabrication process. In this work we report a new generation of the so-called "chemical polishing" approach which circumvents these stumbling blocks in the pretreatment phase and offers a viable, simpler, safer and faster alternative to electropolishing. These benefits are obtained without sacrificing the quality of the final AAO template. In this work we have (a) identified the optimum parameter regime for chemical polishing and (b) determined process conditions for which a novel parallel nanoridge configuration self-assembles and extends over a distance of several microns. Such patterns can be used as a mask for fabricating nanocrossbars, which are the main structural components in myriad nanoscale memories and crosspoint architectures.
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