从真空紫外线通过NIR进行绝对QE测量的系统和方法
A system and methodologies for absolute QE measurements from the vacuum ultraviolet through the NIR
摘要：
在本文中，我们提出了我们的系统设计和方法，使绝对量子效率（QE）的测量，通过真空紫外（VUV）和验证系统与δ掺杂硅CCD。δ掺杂探测器提供了一个很好的平台，以验证测量通过真空紫外由于其增强的紫外响应。通过VUV测量QE的要求比在近UV中的测量更苛刻，并且需要使用真空单色器、良好的杜瓦瓶室真空以防止片上冷凝，以及更严格的处理要求。
英文摘要：
In this paper we present our system design and methodology for making absolute quantum efficiency (QE) measurements through the vacuum ultraviolet (VUV) and verify the system with delta-doped silicon CCDs. Delta-doped detectors provide an excellent platform to validate measurements through the VUV due to their enhanced UV response. The requirements for measuring QE through the VUV are more strenuous than measurements in the near UV and necessitate, among other things, the use of a vacuum monochromator, good dewar chamber vacuum to prevent on-chip condensation, and more stringent handling requirements.
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