石墨烯和少层石墨烯的大面积高通量鉴定和质量控制：工业化应用前景
Large-Area High-Throughput Identification and Quality Control of Graphene and Few-Layer Graphene: Prospects of Industry-Scale Applications
摘要：
石墨烯的实际应用需要一种可靠的高通量石墨烯鉴定和质量控制方法，该方法可用于大规模衬底和晶片。我们已经提出并实验测试了一种快速和全自动的方法来确定石墨烯样品中原子平面的数量。该程序允许原位识别具有相同数量的原子平面的区域的边界。它是基于一个原始的图像处理算法，该算法利用显微拉曼校准，光背景减法，照明不均匀性校正，并为每个像素的彩色和灰度图像处理。开发过程的结果是伪彩色地图，它标记了可以通过光学显微镜捕获的任何尺寸的基底上的单层和少层石墨烯区域。我们的方法适用于各种衬底，并且可以应用于工业规模的机械剥离，化学衍生，沉积或外延石墨烯。
英文摘要：
Practical applications of graphene require a reliable high-throughput method of graphene identification and quality control, which can be used for large-scale substrates and wafers. We have proposed and experimentally tested a fast and fully automated approach for determining the number of atomic planes in graphene samples. The procedure allows for in situ identification of the borders of the regions with the same number of atomic planes. It is based on an original image processing algorithm, which utilizes micro-Raman calibration, light background subtraction, lighting non-uniformity correction, and the color and grayscale image processing for each pixel. The outcome of the developed procedure is a pseudo-color map, which marks the single-layer and few-layer graphene regions on the substrate of any size that can be captured by an optical microscope. Our approach works for various substrates, and can be applied to the mechanically exfoliated, chemically derived, deposited or epitaxial graphene on an industrial scale.
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