碳基材料作为超越摩尔的关键推动者
Carbon-based Materials as Key-enabler for More Than Moore
摘要:
碳基材料如纳米管和石墨烯作为未来的CMOS类器件和互连应用受到了广泛的研究。虽然大部分的兴趣一直致力于与传统CMOS晶体管竞争的器件方面,本文将集中在碳的一些鲜为人知的应用。提出并展示的是互连应用,如电容器的高导电电极、栅极材料或硅通孔(TSV)、新型非易失性存储器、碳硅肖特基二极管或高级传感器。
英文摘要:
Carbon-based materials like nanotubes and graphene are heavily investigated as future CMOS-like devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional CMOS transistors, the paper here will focus on some less known applications of carbon. Proposed and demonstrated are interconnect applications like highly conductive electrodes for capacitors, gate material or through-silicon vias (TSV), novel non-volatile memories, carbon-silicon Schottky diodes or superior sensors.
机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。