基于压阻铁磁薄膜的有源微悬臂梁
Active microcantilevers based on piezoresistive ferromagnetic thin films
摘要：
报道了FeGa磁性薄膜的压阻特性及其在自传感微悬臂梁中的应用。致动发生的FeGa薄膜的铁磁和磁致伸缩属性的结果，而偏转读出是通过利用这些薄膜的压阻性实现的。这种自感测、自致动的微机械系统涉及非常简单的双层结构，这消除了对更复杂的压电叠层的需要，该压电叠层通常用于有源悬臂梁。因此，它有可能为远程驱动的、基于传感器的传感器提供机会。
英文摘要：
We report the piezoresisitivity in magnetic thin films of FeGa and their use for fabricating self transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive property of FeGa thin films, while the deflection readout is achieved by exploiting the piezoresisitivity of these films. This self-sensing, self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated, cantilever-based sensors.
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