伺服带宽为180 kHz的简易压电驱动反射镜
Simple piezoelectric-actuated mirror with 180 kHz servo bandwidth
摘要：
提出了一种用于光学腔长稳定的高带宽压电驱动反射镜。该执行器显示的传递函数具有平坦的幅度响应和大于135 $^\circ$的相位裕度，最高可达200 kHz，从而在闭环伺服回路中实现180 kHz的单位增益频率。据我们所知，该致动器已经实现了压电换能器（PZT）的最大伺服带宽。该致动器在需要精确控制光学长度的各种应用中应该是非常有用的，包括激光频率稳定、光学干涉仪和光学通信。
英文摘要：
We present a high bandwidth piezoelectric-actuated mirror for length stabilization of an optical cavity. The actuator displays a transfer function with a flat amplitude response and greater than 135$^\circ$ phase margin up to 200 kHz, allowing a 180 kHz unity gain frequency to be achieved in a closed servo loop. To the best of our knowledge, this actuator has achieved the largest servo bandwidth for a piezoelectric transducer (PZT). The actuator should be very useful in a wide variety of applications requiring precision control of optical lengths, including laser frequency stabilization, optical interferometers, and optical communications.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
