用于超灵敏微谐振腔探测器的氮化钛薄膜
Titanium Nitride Films for Ultrasensitive Microresonator Detectors
摘要：
氮化钛（TiNx）薄膜是用于超导微谐振器探测器的理想材料，因为：a）临界温度随组成而变化（0 < Tc < 5 K）; b）正常状态电阻率大，ρ_n ~ 100 $μ$ Ohm cm，促进有效的光子吸收并提供大的动力学电感和探测器响应度; c）TiN薄膜非常硬且机械坚固。使用反应溅射TiN薄膜的谐振器显示出非常低的损耗（Q_i > 10 ^7），并且具有与使用其他材料制成的谐振器相似的噪声特性，而准粒子寿命相当长，为10-200 $μ$ s。因此，TiN微谐振器的灵敏度应远低于10^-19 WHz^（-1/2）。
英文摘要：
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, ρ_n ~ 100 $μ$Ohm cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Q_i > 10^7) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 $μ$s. TiN microresonators should therefore reach sensitivities well below 10^-19 WHz^(-1/2).
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